Nominal (98% v), Pre-Filter
Polyflow®-CMP depth cartridges have been developed to reduce post-CMP defectively by removing undesirable large particles and gels from a wide variety of CMP slurries. Its high dirt loading, random-fiber depth media provides consistent particle retention in ratings from 0.2 μm to 30 μm without removing a significant amount of smaller ‘working particles’. The cartridges are thermally bonded from 100% virgin polypropylene to ensure low extractables and chemical compatibility with both acidic and alkaline slurries. Configurations are available in lengths from 5″ to 40″ with 10 fitting options. The specially-designed depth media maximizes fl ow rate and service life to reduce downtime associated with change-outs.